| Nov. 17th | ||||||||
| 15:00 - 17:00 | Registration (at the ANA Hotel lobby) | |||||||
| Nov. 18th | ||||||||
| 08:30 - 09:00 | Registration (at the International Conference Center Hiroshima) | |||||||
| 09:00 - 09:10 | Opening remarks [Chair : Dr. HASHIMOTO Satoshi] | |||||||
| Dr. YOSHIHARA Kazuhiro [NIMS] | ||||||||
| Dr. MOON Dae Won [KRISS] | ||||||||
| 09:10 - 10:00 | Session 1 Standardization 1 (2presentation) [Chair : Dr. LEE Jae Cheol, Dr. HASHIMOTO Satoshi] | |||||||
| 09:10 - 09:35 | AZUMA Yasushi | NMIJ, AIST | Thickness measurement by GIXRR and XPS for establishment of thin film standard | |||||
| 09:35 - 10:00 | YOSHIHARA Kazuhiro | NIMS | Common Data Processing System Version 7 | |||||
| 10:00 - 10:10 | Coffee break | |||||||
| 10:10 - 11:50 | Session 2 Standardization 2 (5 presentation) [Chair : Dr. PARK Yong-Sup, Dr. MIURA Kaoru] | |||||||
| 10:10 - 10:35 | SUZUKI Mineharu | NTT AT Corp. | Development of Sample Holder for Surface Degradation Estimation during XPS Measurement | |||||
| 10:35 - 11:00 | TOHMA Hajime | NISSAN ARC LTD. | Study of Degradation during XPS using New Holders | |||||
| 11:00 - 11:25 | TANUMA Shigeo | NIMS | Development of evaluation method of specimen damage due to electron irradition on AES analysis | |||||
| 11:25 - 11:50 | KANG Hee Jae | Chungbuk National Univ. | Damage distribution in Si surface by low energy Ar ion sputtering | |||||
| 11:50 - 12:15 | HASHIMOTO Satoshi | Kokankeisoku K.K. | Change of Ti2p XPS spectrum for Titanium Oxide by Ar Ion Bombardment | |||||
| 12:15 - 13:25 | Lunch | |||||||
| 13:25 - 15:40 | Session3 Standardization 3 (5presentation) [Chair : Dr. LEE Jong-Wan, Dr. ABE Yoshimi] | |||||||
| 13:25 - 13:50 | KIM Kyung-Joong | KRISS | Certified Reference Materials for SIMS Depth Profiling | |||||
| 13:50 - 14:15 | HOMMA Yoshikazu | NTT Basic Research Lab. | Evaluation of BN-delta-doped multilayers as the reference material for SIMS shallow depth profiling | |||||
| 14:15 - 14:50 | KIM Hyun Kyong | KRISS | Report of SIMS depth profiling RRT in Korea with delta BN multilayers in Si | |||||
| 14:50 - 15:15 | MOON Dae Won | KRISS | Standardization of shallow junction profiling with MEIS and low energy SIMS | |||||
| 15:15 - 15:40 | LEE Jong-Wan | Hallym Univ. | SIMS deconvolution of delta layers in silicon | |||||
| 15:40 - 15:55 | Coffee break | |||||||
| 15:55 - 17:10 | Session 4 Practical Applications and Instrumentation (3 presentation)1 [Chair : Dr. LEE Yeonhee, Dr. FUKUSHIMA Sei] | |||||||
| 15:55 - 16:20 | CHOI Il-Sang | HYNIX Semiconductor Inc. | Characterization of interface between Al2O3/Si using X-ray photoelectron spectroscopy | |||||
| 16:20 - 16:45 | IIDA Shin-ichi | Osaka Univ. | Surface Properties of Sc-O/W(100) System as Emitter at Room and High Temperatures | |||||
| 16:45 - 17:10 | CHO Chae-Ryong | Korea Basic Science Institute | Elemental distribution measurement of sol-gel processed metal oxide films using Auger scanning mapping technique | |||||
| 17:10 - 17:20 | Official information [Secretary] | |||||||
| Nov. 19th | ||||||||
| 08:30 - 09:00 | Registration (at the International Conference Center Hiroshima) | |||||||
| 09:00 - 10:50 | Session 5 Practical Applications and Instrumentation 2(5presentation) [Chair : Dr. KIM Kyung-Joong, Dr. TAKAHASHI Kazuhiro] | |||||||
| 09:00 - 09:25 | YANAGIUCHI Katsuaki | TDK Corp. | A Practical Procedure For Surface Protection of a Bulk Specimen in the Air | |||||
| 09:25 - 09:50 | PARK Yong-Sup | KRISS | Alq3-based OLED with Al/fluoride Cathode: Performance Enhancement and Interface Electronic Structures | |||||
| 09:50 - 10:15 | YASUFUKU Hideyuki | NIMS | Development of X-ray photo-emission electron microscopy (XPEEM) at SPring-8 BL15XU | |||||
| 10:15 - 10:40 | LEE Yeon-Hee | Korea Institute of Sci. and Tech. | Surface Properties and Characterization of Plasma Source Ion Implantaion (PSII)-modified Polymers | |||||
| 10:40 - 11:05 | TANAKA Akihiro | ULVAC-PHI, Inc. | Measurement of Angular Distribution Assymetry of Photoemission from SiO2 | |||||
| 11:05 - 11:15 | Closing remarks, Official Information) [Secretary] | |||||||
| Dr. TANUMA Sigeo | ||||||||
| 11:15 - 12:25 | Lunch | |||||||
| 13:00 - 18:00 | Excursion | |||||||
| 18:00 - 19:00 | Break | ANA Hotel | ||||||
| 19:00 - 21:00 | Banquet | ANA Hotel | ||||||